ULPA Panel Filter for Cleanrooms U15 with CE MPPS

Short Description:

 FU Series ULPA Filter
Provides a collection efficiency of 99.999% or higher
(@0.12 im partical counting method).
High efficiency, Ultra low pressure, low operation cost.
Used for ULSI manufacturing line, semiconductors
manufacturing plants and Ultra clean laboratory.

Product Detail

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 PTFE high efficiency filter


• Very low release of chemical gases (boron, sodium, potassium, silicon).
• The filter paper has high strength, high toughness and impact resistance.
• Chemical resistance, high humidity resistance and superior corrosion resistance.
•Low energy consumption, the pressure loss is reduced by about 40%-50% compared with ordinary glass fiber materials.


cleanroon ffu

equipment ffu


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